JPH0525789Y2 - - Google Patents

Info

Publication number
JPH0525789Y2
JPH0525789Y2 JP1986050820U JP5082086U JPH0525789Y2 JP H0525789 Y2 JPH0525789 Y2 JP H0525789Y2 JP 1986050820 U JP1986050820 U JP 1986050820U JP 5082086 U JP5082086 U JP 5082086U JP H0525789 Y2 JPH0525789 Y2 JP H0525789Y2
Authority
JP
Japan
Prior art keywords
sliding guide
carriage
air
air pads
axis direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986050820U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62161938U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986050820U priority Critical patent/JPH0525789Y2/ja
Publication of JPS62161938U publication Critical patent/JPS62161938U/ja
Application granted granted Critical
Publication of JPH0525789Y2 publication Critical patent/JPH0525789Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP1986050820U 1986-04-07 1986-04-07 Expired - Lifetime JPH0525789Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986050820U JPH0525789Y2 (en]) 1986-04-07 1986-04-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986050820U JPH0525789Y2 (en]) 1986-04-07 1986-04-07

Publications (2)

Publication Number Publication Date
JPS62161938U JPS62161938U (en]) 1987-10-15
JPH0525789Y2 true JPH0525789Y2 (en]) 1993-06-29

Family

ID=30874524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986050820U Expired - Lifetime JPH0525789Y2 (en]) 1986-04-07 1986-04-07

Country Status (1)

Country Link
JP (1) JPH0525789Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4547562B2 (ja) * 2005-01-17 2010-09-22 レーザーテック株式会社 検査装置
JP2014059035A (ja) * 2012-09-19 2014-04-03 Takenori Kawazoe 移動機構および高さ測定器
JP6099290B2 (ja) 2015-01-30 2017-03-22 株式会社東京精密 三次元座標測定装置
JP7206577B2 (ja) * 2021-03-16 2023-01-18 株式会社東京精密 三次元座標測定装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441064B2 (en]) * 1973-09-21 1979-12-06
IT1083098B (it) * 1977-07-11 1985-05-21 Dea Spa Macchina utensile o macchina di misura con scorrimento a pattini pneumatici e magnetici
JPS58177245A (ja) * 1982-04-12 1983-10-17 Toyoda Mach Works Ltd 静圧軸受を用いた可動台のバ−ガイド装置

Also Published As

Publication number Publication date
JPS62161938U (en]) 1987-10-15

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